JPH0177935U - - Google Patents

Info

Publication number
JPH0177935U
JPH0177935U JP1987172025U JP17202587U JPH0177935U JP H0177935 U JPH0177935 U JP H0177935U JP 1987172025 U JP1987172025 U JP 1987172025U JP 17202587 U JP17202587 U JP 17202587U JP H0177935 U JPH0177935 U JP H0177935U
Authority
JP
Japan
Prior art keywords
recess
pedestal
groove
semiconductor
diaphragm element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987172025U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0547393Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987172025U priority Critical patent/JPH0547393Y2/ja
Publication of JPH0177935U publication Critical patent/JPH0177935U/ja
Application granted granted Critical
Publication of JPH0547393Y2 publication Critical patent/JPH0547393Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP1987172025U 1987-11-12 1987-11-12 Expired - Lifetime JPH0547393Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987172025U JPH0547393Y2 (en]) 1987-11-12 1987-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987172025U JPH0547393Y2 (en]) 1987-11-12 1987-11-12

Publications (2)

Publication Number Publication Date
JPH0177935U true JPH0177935U (en]) 1989-05-25
JPH0547393Y2 JPH0547393Y2 (en]) 1993-12-14

Family

ID=31464021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987172025U Expired - Lifetime JPH0547393Y2 (en]) 1987-11-12 1987-11-12

Country Status (1)

Country Link
JP (1) JPH0547393Y2 (en])

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161528A (en) * 1981-03-30 1982-10-05 Mitsubishi Electric Corp Pressure to electricity converter
JPS62163739U (en]) * 1986-04-09 1987-10-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161528A (en) * 1981-03-30 1982-10-05 Mitsubishi Electric Corp Pressure to electricity converter
JPS62163739U (en]) * 1986-04-09 1987-10-17

Also Published As

Publication number Publication date
JPH0547393Y2 (en]) 1993-12-14

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